The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9948064 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 17, 2018

Filed:

Jan. 12, 2017
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventors:

Hiroaki Tsuchiya, Tokyo, JP;

Harunaka Yamaguchi, Tokyo, JP;

Eiji Nakai, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/227 (2006.01); H01S 5/22 (2006.01);
U.S. Cl.
CPC ...
H01S 5/227 (2013.01); H01S 5/2206 (2013.01); H01S 5/2226 (2013.01);
Abstract

A method of manufacturing a semiconductor device includes a step of forming a mesa portion including an active layer above a substrate, and an n-type layer above the active layer, a step of forming a current confinement portion on left and right of the mesa portion, the current confinement portion including a p-type current blocking layer, an n-type current blocking layer above the p-type current blocking layer, and an i-type or p-type current blocking layer above the n-type current blocking layer, and a p-type doping step of diffusing p-type impurities into the i-type or p-type current blocking layer, an upper portion of the n-type current blocking layer, and left and right portions of the n-type layer to change the upper portion of the n-type current blocking layer and the left and right portions of the n-type layer to p-type semiconductors.


Find Patent Forward Citations

Tsuchiya, Hiroaki. (2018). Method of manufacturing semiconductor device, and semiconductor device (U.S. Patent No. 9948064). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9948064

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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