The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Mar. 23, 2015
Screen Holdings Co., Ltd., Kyoto, JP;
Noriyuki Kikumoto, Kyoto, JP;
Kazuhiro Honsho, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
In a substrate processing apparatus, a shield plate includes a first chucking magnetic material (). The shield plate is moved up and down by a chamber opening-and-closing mechanism. A substrate holding part includes a movable chuck member () and a fixed chuck member. The movable chuck member () includes a second chucking magnetic material (). When the shield plate is moved down, the shield plate comes in close proximity to the upper surface of a substrate (), and the first chucking magnetic material () comes in close proximity to the second chucking magnetic material (). The substrate () is held by magnetic action between the first chucking magnetic material () and the second chucking magnetic material (). It is thus possible to hold the substrate () with a simple structure.