The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Dec. 12, 2013
Tokyo Electron Limited, Tokyo, JP;
Tsutomu Hiroki, Nirasaki, JP;
Takehiro Nakayama, Kikugawa, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Provided is a conveyance system that adjusts the position of a conveyed substrate, prevents damage resulting from the heat of another apparatus in a conveyance base, prevents insufficient electrical power of another apparatus in the conveyance base, and can move the conveyance base smoothly. A substrate processing system is provided with a conveyance chamber and a sliding box moving within the conveyance chamber. A plurality of processing modules are connected, and the sliding box is provided with: a conveyance arm that moves wafers; a servo motor that moves the conveyance arm; and a servo motor driver that controls the electrical power supplied to the servo motor. A servo motor controller that controls the servo motor driver is disposed outside a transfer module, and the servo motor driver and servo motor controller perform optical communication.