The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2018
Filed:
Jan. 28, 2011
Applicants:
Aihua Chen, Shanghai, CN;
Ryoji Todaka, Shanghai, CN;
Gerald Yin, Shanghai, CN;
Inventors:
Assignees:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA, George Town, Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6719 (2013.01); C23C 16/458 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C23C 16/4584 (2013.01);
Abstract
A processing apparatus for semiconductor work pieces and related methodology is disclosed and which includes a processing chamber having an internal cavity, and which has a plurality of rotatable processing stations positioned therein and wherein the rotatable processing stations each process a semiconductor work piece.