Method of manufacturing silicon carbide semiconductor device

Abstract

A method of manufacturing a silicon carbide semiconductor device. The method includes providing an n-type semiconductor substrate having first and second principal surfaces, introducing an impurity from a first principal surface of the semiconductor substrate at a first position, activating the impurity to form a diffusion layer in the semiconductor substrate at a second position, implanting protons at a third position that is deeper from the first principal surface than the first position, the protons generating crystal defects in a region through which the protons pass, converting by thermal treating the protons into hydrogen induced donors to form an n-type field stop layer at a fourth position deeper from the first principal surface than the second position, reducing by the thermal treating the generated crystal defects to form an n-type crystal defect reduction region, and forming an electrode on the second principal surface after implanting the protons.