The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 10, 2018

Filed:

Dec. 22, 2016
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Chin-Cheng Yang, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76816 (2013.01); H01L 21/0273 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 23/5329 (2013.01); H01L 23/53257 (2013.01); H01L 23/53271 (2013.01);
Abstract

A pad structure including a plurality of material pairs and a plurality of pads is provided. The material pairs are stacked on a substrate to form a stair step structure. A stair step of the stair step structure includes one of material pairs. Each of the material pairs includes a conductive layer and a dielectric layer on the conductive layer. Each of the pads is embedded in one stair step of the stair step structure and exposed by the dielectric layer corresponding to the one stair step and another stair step above the one stair step. A thickness of one of the pads is greater than a thickness of one of the conductive layers.


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