The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Feb. 01, 2017
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Leon van Kouwen, Rotterdam, NL;
Gerard Nicolaas Anne van Veen, Waarle, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/147 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 37/147 (2013.01); H01J 37/261 (2013.01);
Abstract
A source assembly for producing an ion beam and comprising a collision ionization ion source having: The various sources in said plurality preferably have a scattering quotient Q=d/lwith a value in a range 1-500, preferably in a range 1-200, where lis an ionic mean free path length in said ionization space.