The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Jan. 11, 2016
Mapper Lithography Ip B.v., Delft, NL;
Johan Joost Koning, Hillegom, NL;
David Johannes van den Bergen, The Hague, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
The invention relates to a target processing unit () comprising a vacuum chamber () for accommodating a target to be processed, a projection column () within the vacuum chamber for generating a beam and projecting the beam towards the target, and a first conduit arrangement () for connecting the projection column to external equipment (). The vacuum chamber can comprise a positioning system () for supporting the target, and a second conduit arrangement () distinct from the first conduit arrangement for connecting the positioning system to external equipment, wherein the positioning system is moveably arranged with respect to the projection column, and wherein the positioning system and the projection column occupy spatially distinct portions of the vacuum chamber. The first conduit arrangement extends through an upper side of the vacuum chamber, and the second conduit arrangement extends through a lower side of the vacuum chamber.