The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Jun. 16, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Arpit Yati, Lucknow, IN;
Assignee:
KLA—Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06T 7/33 (2017.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0006 (2013.01); G06T 7/337 (2017.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A system and method to image a layer of a wafer based on a coordinate of a defect in a pre-layer of the wafer are disclosed. A design file for the current layer can be aligned to the wafer using an image of the current layer. A design file for a previous layer can be aligned to the design file for the current layer.