The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Dec. 05, 2013
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Petrus Augustinus Franciscus Klomp, Veldhoven, NL;
Bastiaan Matthias Mertens, Veldhoven, NL;
Arnoud Willem Notenboom, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 21/6875 (2013.01); H02N 13/00 (2013.01);
Abstract
An electrostatic clamp () comprising an electrode (), a layer of resistive material () located on the electrode, and a layer of dielectric () located on the resistive material, wherein the electrostatic clamp further comprises burls () which project from the layer of dielectric.
Quick Actions:
Klomp, Petrus Augustinus Franciscus. (2018). Electrostatic clamp (U.S. Patent No. 9939737). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9939737
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