The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 03, 2018

Filed:

Nov. 13, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

James W. Adkisson, Jericho, VT (US);

Panglijen Candra, Essex Junction, VT (US);

Thomas J. Dunbar, Burlington, VT (US);

Jeffrey P. Gambino, Portland, OR (US);

Mark D. Jaffe, Shelburne, VT (US);

Anthony K. Stamper, Burlington, VT (US);

Randy L. Wolf, Essex Junction, VT (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/64 (2006.01); H03H 3/04 (2006.01); H03H 3/08 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H01L 41/09 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); G06F 17/50 (2006.01); H03H 9/48 (2006.01); H03H 9/54 (2006.01); H01P 1/205 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); B81B 7/008 (2013.01); B81B 7/02 (2013.01); G06F 17/5045 (2013.01); H01L 41/094 (2013.01); H01L 41/0973 (2013.01); H03H 3/08 (2013.01); H03H 9/0542 (2013.01); H03H 9/1064 (2013.01); H03H 9/1092 (2013.01); H03H 9/48 (2013.01); H03H 9/542 (2013.01); H03H 9/6423 (2013.01); H03H 9/0547 (2013.01); H03H 9/6403 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49005 (2015.01); Y10T 29/49126 (2015.01); Y10T 29/49147 (2015.01); Y10T 29/49156 (2015.01);
Abstract

Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam formed above the piezoelectric substrate and at a location in which, upon actuation, the MEMS beam shorts the piezoelectric filter structure by contacting at least one of the plurality of electrodes.


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