The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
May. 12, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Laurence S. Hordon, Mountain View, CA (US);
Nikolai Chubun, San Jose, CA (US);
Luca Grella, Gilroy, CA (US);
Xinrong Jiang, Palo Alto, CA (US);
Daniel Bui, Castro Valley, CA (US);
Kevin Cummings, Milpitas, CA (US);
Christopher Sears, San Jose, CA (US);
Oscar G. Florendo, Hillister, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system, such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.