The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Mar. 27, 2014
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Yasuhiro Omura, Kumagaya, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01); G03F 7/20 (2006.01); G02B 9/34 (2006.01); G02B 17/08 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 9/34 (2013.01); G02B 17/0844 (2013.01); G03F 7/70225 (2013.01); G03F 7/70341 (2013.01); H01L 21/027 (2013.01);
Abstract
A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.