The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Mar. 04, 2016
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Tomoko Fujiwara, Kanagawa, JP;
Takao Sueyama, Kanagawa, JP;
Keiko Kaneda, Chiba, JP;
Michiko Ego, Saitama, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 31/28 (2006.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2874 (2013.01); G01R 31/2863 (2013.01); G01R 1/07342 (2013.01); G01R 1/07371 (2013.01);
Abstract
A probe card includes a probe; and a probe card substrate which includes a first member and a second member, the first member having a first surface provided with the probe and the second member having a second surface surrounding the first surface, wherein a direction of the first surface is different from a direction of the second surface.