The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Apr. 14, 2015
Applicant:
Tsmc Solar Ltd., Taichung, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27B 5/14 (2006.01); F27B 5/06 (2006.01); F27D 3/12 (2006.01); F27D 11/02 (2006.01); H01L 31/18 (2006.01); C23C 14/22 (2006.01); F27D 5/00 (2006.01); H01L 31/032 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); F27D 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1864 (2013.01); C23C 14/18 (2013.01); C23C 14/34 (2013.01); C23C 14/5806 (2013.01); F27B 5/14 (2013.01); F27D 5/0037 (2013.01); H01L 21/67109 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); H01L 31/0322 (2013.01); H01L 31/18 (2013.01); F27D 2003/0087 (2013.01); Y02E 10/541 (2013.01);
Abstract
An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.