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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9929290 B1

PDFFull Text
Date of Patent:
Mar. 27, 2018

Filed:

Jun. 20, 2016

Electrical and optical via connections on a same chip

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Juntao Li, Cohoes, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Chengwen Pei, Danbury, CT (US);

Geng Wang, Stormville, NY (US);

Joseph Ervin, Wappingers Falls, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:

Michael Le Strange

Andrew M. Calderon

Roberts Mlotkowski Safran, Cole & Calderon, P.C.

Primary Examiner:

Ellen Kim

Int. Cl.
CPC ...
G02B 6/12 (2006.01); H01L 31/0232 (2014.01); H01L 23/48 (2006.01); H01L 31/02 (2006.01); G02B 6/122 (2006.01); G02B 6/42 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02327 (2013.01); G02B 6/122 (2013.01); G02B 6/428 (2013.01); H01L 23/481 (2013.01); H01L 31/02005 (2013.01); G02B 2006/12061 (2013.01); G02B 2006/12123 (2013.01);
Abstract

The present disclosure relates to semiconductor structures and, more particularly, to electrical and optical via connections on a same chip and methods of manufacture. The structure includes an optical through substrate via (TSV) comprising an optical material filling the TSV. The structure further includes an electrical TSV which includes a liner of the optical material and a conductive material filling remaining portions of the electrical TSV.

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Li, Juntao. (2018). Electrical and optical via connections on a same chip (U.S. Patent No. 9929290). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9929290

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