The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Oct. 11, 2016
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Young-Sik Park, Hwaseong-si, KR;

Yi-Gwon Kim, Hwaseong-si, KR;

Yong-Kug Bae, Hwaseong-si, KR;

Sung-Won Choi, Yongin-si, KR;

Hee-Ho Ku, Hwaseong-si, KR;

Ga-Hyun Yang, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 23/544 (2006.01); H01L 21/66 (2006.01); H01L 23/552 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); G03F 7/70633 (2013.01); H01L 22/20 (2013.01); H01L 23/552 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/5446 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A semiconductor device includes a substrate including at least two semiconductor chip regions and a scribe lane region disposed between the semiconductor chip regions. The semiconductor device additionally includes a first optical measurement pattern disposed on the substrate. The semiconductor device further includes a second optical measurement pattern disposed on an upper layer of the first optical measurement pattern, the second optical measurement pattern being spaced apart from the first optical measurement pattern. The semiconductor device additionally includes a three-dimensional (3D) shielding structure surrounding the first optical measurement pattern and including an electrically conductive material.


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