The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Oct. 05, 2016
Dongfang Jingyuan Electron Limited, Beijing, CN;
Dongfang Jingyuan Electron Limited, Beijing, CN;
Abstract
A method for managing defects for an augmented automatic defect classification (ADC) process is disclosed. The method includes receiving a defect record based on an inspection of a target specimen; extracting, from a design database, relevant design data associated with a patch surrounding a location of a defect from the defect record; performing, by a processor, lithographic simulation on the relevant design data associated with the patch to determine a context patch; comparing, by the processor, the context patch with an image of the defect from the defect record to determine whether there exists a match between the context patch and the image of the defect; and defining the defect as a systematic defect based on a determination that there exists a match between the context patch and the image of the defect.