The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Feb. 24, 2016
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Koos Van Berkel, Waalre, NL;
Duygu Akbulut, Eindhoven, NL;
Jeroen Johan Maarten Van De Wijdeven, Eindhoven, NL;
Ferry Zijp, Nuenen, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 9/00 (2006.01); G02B 21/00 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70775 (2013.01); G01N 21/956 (2013.01); G02B 21/0016 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G03F 9/7019 (2013.01);
Abstract
A method and apparatus for position control of a component relative to a surface is disclosed. The method may include calculating an estimated effect of, or derived from, Casimir force acting between the component and the surface, and compensating positioning of the component relative to the surface using the estimated effect.