The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
May. 01, 2015
Asml Netherlands B.v., Veldhoven, NL;
Hans Butler, Best, NL;
Wilhelmus Henricus Theodorus Maria Aangenent, Eindhoven, NL;
Nic Jasper Dirkx, 's Hertogenbosch, NL;
Ramidin Izair Kamidi, Eindhoven, NL;
Wilhelmus Franciscus Johannes Simons, Beesel, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An object positioning system including a movable object, an actuator system and a control system. The moveable object is moveable relative to a reference. The actuator system is configured to apply a force to the object at a force application location on the object in order to move the moveable object relative to the reference. The control system is configured to position a point of interest of the object relative to the reference. The control system is configured to drive the actuator system based on a parameter representing a spatial relationship between the force application location and the point of interest. The parameter is dependent on a further parameter representing a position of the object relative to the reference.