The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jun. 02, 2015
Applicant:
Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-do, KR;
Inventors:
Ji-myung Kim, Hwaseong-si, KR;
Gyu-min Jeong, Ulsan, KR;
Tae-hwa Jeong, Hwaseong-si, KR;
Kwang-sub Yoon, Yongin-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 23/544 (2006.01); G01B 11/06 (2006.01); G01N 21/956 (2006.01); G01N 21/93 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70683 (2013.01); G01B 11/0641 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G03F 7/70641 (2013.01); H01L 23/544 (2013.01); G01N 21/93 (2013.01); G01N 21/956 (2013.01);
Abstract
A substrate can include a feature pattern included in an integrated circuit on the substrate and an in-situ metrology pattern spaced apart from the feature pattern on the substrate, the in-situ metrology pattern and the feature pattern both configured to have equal heights relative to a surface of the substrate.