The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Nov. 12, 2013
Sumitomo Electric Industries, Ltd., Osaka-shi, Osaka, JP;
Keiji Ishibashi, Itami, JP;
Takuya Yanagisawa, Itami, JP;
Koji Uematsu, Itami, JP;
Yuki Seki, Itami, JP;
Yoshiyuki Yamamoto, Itami, JP;
SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka-shi, Osaka, JP;
Abstract
A group III nitride composite substrate with a diameter of 75 mm or more includes a support substrate and a group III nitride film with a thickness of 50 nm or more and less than 10 μm that are bonded to each other. A ratio s/mof a standard deviation sof the thickness of the group III nitride film to a mean value mof the thickness thereof is 0.01 or more and 0.5 or less, and a ratio s/mof a standard deviation sof an absolute value of an off angle between a main surface of the group III nitride film and a plane of a predetermined plane orientation to a mean value mof the absolute value of the off angle is 0.005 or more and 0.6 or less.