The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Feb. 19, 2013
Tokyo Electron Limited, Tokyo, JP;
Taichi Hirano, Miyagi, JP;
Fumitoshi Kumagai, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A power supply systemincludes high frequency power suppliesandthat supply a high frequency power for plasma generation; a DC power supplythat supplies a DC voltage to be applied to an electrode; and control unitthat controls the high frequency power suppliesandand the DC power supplyincluding a first DC power supply unitthat supplies a first negative DC voltage V, a second DC power supply unitthat supplies a second negative DC voltage Vhaving a higher absolute value than the first negative DC voltage V, and a selecting circuitthat selectively connects the first DC power supply unitand the second DC power supply unitto the electrode; and a discharging circuitconnected with a nodebetween the first DC power supply unitand the selecting circuit