The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Feb. 03, 2015
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;

Inventors:

Jun-Ho Sim, Suwon-si, KR;

Jung-In Park, Seoul, KR;

Ki-Beom Lee, Seoul, KR;

Hi-Kuk Lee, Yongin-si, KR;

Hyun-Seok Kim, Hwaseong-si, KR;

Kab-Jong Seo, Seoul, KR;

Sang-Hyun Yun, Suwon-si, KR;

Sang-Hyun Lee, Suwon-si, KR;

Jung-Chul Heo, Seoul, KR;

Jong-Joo Kim, Gunpo-si, KR;

Chang-Hoon Kim, Asan-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70641 (2013.01); G02B 26/0833 (2013.01); G03F 7/2053 (2013.01); G03F 7/70291 (2013.01); G03F 7/70383 (2013.01); G03F 7/70391 (2013.01);
Abstract

A maskless exposure device includes a stage on which a substrate is disposed, an optical head, and an optical source part. The optical head irradiates light to the substrate. The light source part provides the optical head with a light. The optical head irradiates the light, according to an average-focus distance, to the substrate. The average-focus distance is determined by averaging best-focus distances for a plurality of regions of the substrate, respectively.


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