The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Sep. 02, 2015
Boe Technology Group Co., Ltd., Beijing, CN;
South China University of Technology, Guangzhou, Guangdong, CN;
Guangcai Yuan, Beijing, CN;
Liangchen Yan, Beijing, CN;
Xiaoguang Xu, Beijing, CN;
Lei Wang, Beijing, CN;
Junbiao Peng, Beijing, CN;
Linfeng Lan, Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
SOUTH CHINA UNIVERSITY OF TECHNOLOGY, Guangzhou, Guangdong, CN;
Abstract
This disclosure discloses an oxide semiconductor thin film, a thin film transistor, a manufacturing method and a device, belonging to the field of flat panel display. The oxide semiconductor thin film is made of an oxide containing zirconium and indium. A method of manufacturing the oxide semiconductor thin film comprises preparing a target using the oxide containing zirconium and indium, and sputtering the target to obtain the oxide semiconductor thin film.