The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Jun. 18, 2015
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Noriyuki Inoue, Tokyo, JP;
Yoshiko Takashima, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 23/00 (2006.01); H01J 37/20 (2006.01); G01N 1/36 (2006.01); H01J 37/16 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G01N 1/36 (2013.01); H01J 37/16 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/2801 (2013.01);
Abstract
A specimen loading method for loading a specimen that contains water into a specimen chamber of a charged particle beam device, includes: a step (S) of mounting the specimen on a specimen support; a step (S) of covering a predetermined area of the specimen with a water retention material; a step (S) of evacuating the specimen chamber in which the specimen having the predetermined area covered with the water retention material is placed; and a step (S) of exposing the predetermined area covered with the water retention material.