The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Dec. 22, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Johannes Eisenmenger, Ulm, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01); G02B 26/08 (2006.01); G02B 17/08 (2006.01); G02B 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 7/006 (2013.01); G02B 7/008 (2013.01); G02B 17/0892 (2013.01); G02B 26/0833 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G03F 7/70825 (2013.01); G03F 7/70891 (2013.01);
Abstract
The disclosure provides an optical component that includes an optical element fixed in the transverse direction in a frame. The frame has a linear expansion of at most 0.01% in the transverse direction even in the case of a linear expansion of the optical element in the transverse direction by up to 1%.