The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Jun. 18, 2013
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Yamada, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A device of contacting a substrate with a probe card includes a mounting tablethat transfers a wafer W together with a wafer plateto a position facing the probe card; a lifting devicethat contacts multiple electrodes of semiconductor devices formed on the wafer W with multiple probes of the probe cardby moving the wafer plateand the wafer W toward the probe cardand then further moves the wafer W toward the probe card; a depressurization paththat decompresses a space S between the probe cardand the wafer plateand maintains a contact state between the electrodes of the semiconductor devices and probesof the probe card; and the lifting devicethat separates a chuck memberon the mounting tablefrom the wafer plate