The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2018

Filed:

Jan. 03, 2013
Applicants:

Linwei Yu, Palaiseau, FR;

Pere Roca I Cabarrocas, Villebon sur Yvette, FR;

Inventors:

Linwei Yu, Palaiseau, FR;

Pere Roca I Cabarrocas, Villebon sur Yvette, FR;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/042 (2014.01); H01L 31/075 (2012.01); B82Y 40/00 (2011.01); H01L 21/00 (2006.01); H01L 21/20 (2006.01); H01L 31/18 (2006.01); B82Y 10/00 (2011.01); H01L 21/02 (2006.01); H01L 31/0352 (2006.01); H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 29/161 (2006.01); H01L 29/24 (2006.01); H01L 31/077 (2012.01); H01L 29/167 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 31/182 (2013.01); B82Y 10/00 (2013.01); H01L 21/0262 (2013.01); H01L 21/02422 (2013.01); H01L 21/02472 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02603 (2013.01); H01L 21/02645 (2013.01); H01L 21/02653 (2013.01); H01L 29/068 (2013.01); H01L 29/0665 (2013.01); H01L 29/0676 (2013.01); H01L 29/16 (2013.01); H01L 29/161 (2013.01); H01L 29/167 (2013.01); H01L 29/24 (2013.01); H01L 31/035227 (2013.01); H01L 31/035272 (2013.01); H01L 31/035281 (2013.01); H01L 31/075 (2013.01); H01L 31/077 (2013.01); H01L 31/18 (2013.01); H01L 31/1804 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); Y02E 10/547 (2013.01); Y02E 10/548 (2013.01); Y02P 70/521 (2015.11);
Abstract

A method for the low-temperature production of radial electronic junction semiconductor nanostructures on a substrate, includes: a) forming on the substrate, metal aggregates capable of electronically doping a first semiconductor material; b) growing, in the vapor phase, doped semiconductor nanowires in the presence of one or more non-dopant precursor gases of the first semiconductor material, the substrate being heated to a temperature at which the metal aggregates are in the liquid phase, the growth of the doped semiconductor nanowires in the vapor phase being catalyzed by the metal aggregates; c) rendering the residual metal aggregates inactive; and d) the chemical vapor deposition, in the presence of one or more precursor gases and a dopant gas, of at least one thin film of a second semiconductor material so as to form at least one radial electronic junction nanostructure between the nanowire and the at least one doped thin film.


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