The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
May. 13, 2014
Applicant:
Mrsi Systems, Llc, N Billerica, MA (US);
Inventors:
Nicholas Samuel Celia, Jr., Avon, MA (US);
Cyriac Devasia, Nashua, NH (US);
Assignee:
MRSI Systems, LLC, N. Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 37/04 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); B23K 37/0408 (2013.01); H01L 24/81 (2013.01); H01L 24/13 (2013.01); H01L 2224/13101 (2013.01); H01L 2224/755 (2013.01); H01L 2224/75101 (2013.01); H01L 2224/75251 (2013.01); H01L 2224/75252 (2013.01); H01L 2224/75265 (2013.01); H01L 2224/75266 (2013.01); H01L 2224/75267 (2013.01); H01L 2224/75281 (2013.01); H01L 2224/75282 (2013.01); H01L 2224/75301 (2013.01); H01L 2224/75901 (2013.01); H01L 2224/81097 (2013.01); H01L 2224/81098 (2013.01); H01L 2224/81203 (2013.01); H01L 2224/81815 (2013.01); H01L 2924/181 (2013.01); H01L 2924/2011 (2013.01); H01L 2924/20105 (2013.01); H01L 2924/20111 (2013.01); H01L 2924/351 (2013.01);
Abstract
Co-planarity adjustment systems and methods, gantries capable of applying high force without imposing moment loads to their bearings, systems and methods for achieving rapid heating and cooling and efficient slidable seal systems capable of sealing a chamber and injecting one or more fluids into the chamber as well as actively recovering portions of such fluid which have migrated into the seal itself are disclosed in the context of thermo-compression bonding systems, apparatuses and methods, although many alternative uses will be apparent to those of skill in the art.