The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
May. 11, 2015
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/34 (2012.01); B24B 37/20 (2012.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
B24B 37/20 (2013.01); B24B 37/34 (2013.01); H01L 21/304 (2013.01);
Abstract
An apparatus for replacing a polishing table, which is used in a polishing apparatus for polishing a substrate such as wafer, is disclosed. The polishing table replacement apparatus () is used for removing a polishing table () from a polishing apparatus (). This polishing table replacement apparatus () includes a crane () configured to move the polishing table () vertically and horizontally, a table stage () on which the polishing table () can be placed, and a table-stage tilting mechanism () configured to tilt the table stage ().
Quick Actions:
Suemasa, Shuichi. (2018). Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine (U.S. Patent No. 9908212). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9908212
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile