The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Jan. 09, 2014
Applicant:

Advantest (Singapore) Pte. Ltd., Singapore, SG;

Inventor:

Henry Arnold, Yorba Linda, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); G05B 19/41875 (2013.01); G05B 2219/32191 (2013.01); G05B 2219/32206 (2013.01); G05B 2219/32224 (2013.01); G05B 2219/37224 (2013.01); Y02P 90/22 (2015.11);
Abstract

A method for analyzing test results. The method includes selecting a first subset of tests from a plurality of tests. Test results are gathered from the plurality of tests in real-time. A first statistical analysis is performed on test results from the first subset of tests. At least one process control rule is initiated as determined by results of the first statistical analysis performed on the test results from the first subset of tests.


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