The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Dec. 31, 2015
Toshiba Memory Corporation, Tokyo, JP;
Atsuko Sakata, Mie, JP;
Takeshi Ishizaki, Aichi, JP;
Shinya Okuda, Oita, JP;
Kei Watanabe, Mie, JP;
Masayuki Kitamura, Mie, JP;
Satoshi Wakatsuki, Mie, JP;
Daisuke Ikeno, Mie, JP;
Junichi Wada, Mie, JP;
Hirotaka Ogihara, Mie, JP;
Toshiba Memory Corporation, Tokyo, JP;
Abstract
According to one embodiment, the stacked body includes a plurality of metal films, a plurality of silicon oxide films, and a plurality of intermediate films. The intermediate films are provided between the metal films and the silicon oxide films. The intermediate films contain silicon nitride. Nitrogen composition ratios of the intermediate films are higher on sides of interfaces between the intermediate films and the metal films than on sides of interfaces between the intermediate films and the silicon oxide films. Silicon composition ratios of the intermediate films are higher on sides of interfaces between the intermediate films and the silicon oxide films than on sides of interfaces between the intermediate films and the metal films.