The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Oct. 18, 2016
Applicant:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Inventors:
Frank Sinclair, Boston, MA (US);
Daniel Tieger, Manchester, MA (US);
Edward W. Bell, Newbury, MA (US);
Robert Lindberg, Rockport, MA (US);
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC., Gloucester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/26 (2006.01); H01J 23/09 (2006.01); H01J 27/02 (2006.01); G21K 5/02 (2006.01); H01J 37/317 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01); H01J 37/08 (2013.01); H01J 2237/0475 (2013.01);
Abstract
An apparatus an ion beam generator to provide an ion beam. A scanning system may receive the ion beam and provide a scanned beam. An electrode may receive the scanned beam. At least a portion of the electrode is normal to a propagation direction of the scanned beam. The portion of the electrode that is normal to the propagation direction the scan beam may have a curved shape.