The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2018
Filed:
Feb. 23, 2016
Applicant:
Nova Measuring Instruments Ltd., Rehovot, IL;
Inventor:
Boaz Brill, Rehovot, IL;
Assignee:
NOVA MEASURING INSTRUMENTS LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/00 (2017.01); G01B 21/02 (2006.01); G03F 7/20 (2006.01); G01B 11/02 (2006.01); G06T 7/80 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G01B 11/02 (2013.01); G01B 21/02 (2013.01); G03F 7/70625 (2013.01); G06T 7/80 (2017.01); G01B 2210/56 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A system and method are presented for use in inspection of patterned structures. The system comprises: data input utility for receiving first type of data indicative of image data on at least a part of the patterned structure, and data processing and analyzing utility configured and operable for analyzing the image data, and determining a geometrical model for at least one feature of a pattern in said structure, and using said geometrical model for determining an optical model for second type of data indicative of optical measurements on a patterned structure.