The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 27, 2018

Filed:

Mar. 31, 2015
Applicant:

Cadence Design Systems, Inc., San Jose, CA (US);

Inventors:

Roland Ruehl, San Carlos, CA (US);

Alexandre Arkhipov, San Jose, CA (US);

Giles V. Powell, Alameda, CA (US);

Karun Sharma, San Jose, CA (US);

Assignee:

Cadence Design Systems, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01L 27/00 (2006.01); G03F 1/00 (2012.01); G03F 7/00 (2006.01); G03F 1/70 (2012.01); G03F 7/20 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G06F 17/5077 (2013.01); G03F 1/70 (2013.01); G03F 7/70425 (2013.01); G06F 17/5068 (2013.01); G06F 2217/12 (2013.01); H01L 27/0207 (2013.01);
Abstract

Disclosed are techniques for implementing DRC clean multi-patterning process nodes with lateral fills. These techniques identify design rules governing multi-patterning and track patterns by accessing a rule deck to retrieve the design rules, identify a first shape and a second shape sandwiching a space and characteristics of the first and second shapes by examining design data of the electronic design, insert one or more lateral fill shapes in the space by implementing the one or more lateral fill shapes along one or more routing tracks of a legal track pattern while automatically complying with the design rules, and perform post-lateral fill or post-layout operations to improve the layout and to prepare the layout for manufacturing.


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