Parallel plate capacitor and acceleration sensor comprising same

Abstract

A parallel plate capacitor includes a first polar plate (), and a second polar plate disposed opposite to the first polar plate (). The parallel plate capacitor further includes at least a pair of sensitive units disposed on a substrate forming the first polar plate (); the sensitive units includes sensitive elements () and element connecting arms () connecting the sensitive elements () to the first polar plate (). The parallel plate capacitor further includes anchoring bases () disposed on a substrate where the second polar plate is located; the anchoring bases () are connected to the element connecting arms () via cantilever beams (); each element connecting arm () is connected to at least two anchoring bases (), which are symmetric with respect to the element connecting arm. The parallel plate capacitor is more likely to be influenced by an external factor, thus being more likely to experience capacitance change. An acceleration sensor including the parallel plate capacitor is also provided.