The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Mar. 05, 2015
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventor:
Yu-Chi Chen, Hsinchu County, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01); H01J 37/302 (2006.01); H01J 37/147 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3174 (2013.01); H01J 37/147 (2013.01); H01J 37/3007 (2013.01); H01J 37/3026 (2013.01); H01J 37/3175 (2013.01); H01J 2237/15 (2013.01); H01J 2237/30472 (2013.01); H01J 2237/3175 (2013.01); H01J 2237/31762 (2013.01); H01J 2237/31774 (2013.01); H01J 2237/31789 (2013.01);
Abstract
A method of manufacturing a substrate is disclosed. The method includes receiving a plurality of pixel elements, wherein each of the pixel elements includes data members; and transferring the data members to a plurality of exposing devices that are configured to conditionally expose the substrate with an incident energy beam when coupled with the data members, wherein different data members of one pixel element are transferred at different system cycles.