The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2018
Filed:
Jan. 20, 2015
Asml Netherlands B.v., Veldhoven, NL;
Wilhelmus Henricus Theodorus Maria Aangenent, Eindhoven, NL;
Lucas Franciscus Koorneef, Eindhoven, NL;
Theo Anjes Maria Ruijl, Eindhoven, NL;
Stanley Constant Johannes Martinus Van Den Berg, Veldhoven, NL;
Stan Henricus Van Der Meulen, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Pieter Hubertus Godefrida Wullms, Veldhoven, NL;
Richard Henricus Adrianus Van Lieshout, Batenburg, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.