The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 20, 2018

Filed:

Mar. 25, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Bing Dang, Chappaqua, NY (US);

John U. Knickerbocker, Yorktown Heights, NY (US);

Jae-Woong Nah, New York, NY (US);

Robert E. Trzcinski, Rhinebeck, NY (US);

Cornelia Kang-I Tsang, Mohegan Lake, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); G01R 31/00 (2006.01); G01R 1/04 (2006.01); H01L 21/66 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
G01R 1/0408 (2013.01); G01R 1/06761 (2013.01); H01L 22/34 (2013.01); H01L 23/49838 (2013.01); H01L 2224/0401 (2013.01);
Abstract

A test probe structure having a planar surface and contact locations matched to test hardware is provided. The fabrication of the test probe structure addresses problems related to the possible deformation of base substrates during manufacture. Positional accuracy of contact locations and planarity of base substrates is achieved using dielectric layers, laser ablation, injection molded solder or redistribution layer wiring, and planarization techniques.


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