The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 13, 2018

Filed:

Apr. 07, 2017
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Hideki Koshimizu, Tokyo, JP;

Xin Lu, Tokyo, JP;

Yurika Araya, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/00 (2006.01); H01L 23/29 (2006.01); H01L 21/67 (2006.01); H01L 23/31 (2006.01); H01L 21/78 (2006.01); H01L 21/782 (2006.01);
U.S. Cl.
CPC ...
H01L 23/29 (2013.01); H01L 21/6715 (2013.01); H01L 21/67121 (2013.01); H01L 21/67126 (2013.01); H01L 21/78 (2013.01); H01L 21/782 (2013.01); H01L 23/3178 (2013.01);
Abstract

Disclosed herein is a packaged wafer manufacturing method including the steps of forming a groove along each division line on the front side of a wafer, each groove having a depth greater than the finished thickness of the wafer, next removing a chamfered portion from the outer circumference of the wafer to thereby form a step portion having a depth greater than the depth of each groove, next setting a die of a molding apparatus on the bottom surface of the step portion of the wafer in the condition where a space is defined between the die and the wafer, and next filling a mold resin into this space. Accordingly, the device area of the wafer is covered with the mold resin and each groove of the wafer is filled with the mold resin to thereby obtain a packaged wafer.


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