The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Sep. 08, 2015
Kla-tencor Corporation, Milpitas, CA (US);
Joseph Walsh, Soquel, CA (US);
Frank Barkusky, San Jose, CA (US);
Eduardo Soto, Campbell, CA (US);
Sarbjit Singh Grewal, Elk Grove, CA (US);
Orlando Threet, San Jose, CA (US);
Gildardo Rios Delgado, Livermore, CA (US);
Garry Allen Rose, Livermore, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A device includes spectral purity filters (SPF) and structures for supporting SPF films. The device further includes a monolithic support having a mesh portion and a frame portion and a film overlaying at least a portion of the support. In some cases, the film can be affixed to the support without an adhesive. The monolithic support can be Silicon, stainless steel or some other suitable material and the film can be a single layer spectral purity filter film or a multilayer spectral purity filter film. The mesh portion of the support can include a plurality of through-holes that are formed by etching and/or eroding a thinned material such as silicon or stainless steel.