The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Sep. 17, 2013
Applicant:
Mitsubishi Materials Corporation, Tokyo, JP;
Inventors:
Hitoshi Inaba, Naka, JP;
Noriaki Nagatomo, Naka, JP;
Assignee:
MITSUBISHI MATERIALS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01C 7/10 (2006.01); G01K 7/22 (2006.01); H01C 1/142 (2006.01); H01C 1/148 (2006.01); H01C 7/04 (2006.01);
U.S. Cl.
CPC ...
G01K 7/223 (2013.01); G01K 7/22 (2013.01); H01C 1/142 (2013.01); H01C 1/148 (2013.01); H01C 7/041 (2013.01);
Abstract
The temperature sensor includes an insulating film; a thin film thermistor portion which is formed on the surface of the insulating film with a thermistor material of TiAlN; the pair of interdigitated electrodes which have a plurality of comb portions and are pattern-formed on the thin film thermistor portion using a metal so as to face each other; and the pair of pattern electrodes which are pattern-formed on the surface of the insulating film and are connected to the pair of interdigitated electrodes, wherein at least a part of each of the pattern electrodes is formed of a conductive resin.