The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Jul. 14, 2015
Applicant:
Zygo Corporation, Middlefield, CT (US);
Inventors:
Leslie L. Deck, Middletown, CT (US);
Jan Liesener, Middletown, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/34 (2006.01); G01D 5/347 (2006.01); G01D 5/26 (2006.01);
U.S. Cl.
CPC ...
G01D 5/34707 (2013.01); G01D 5/266 (2013.01);
Abstract
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.