The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2018
Filed:
Nov. 11, 2013
Asml Netherlands B.v., Veldhoven, NL;
Yvonne Wendela Kruijt-Stegeman, Eindhoven, NL;
Raymond Jacobus Wilhelmus Knaapen, Helmond, NL;
Johan Frederik Dijksman, Weert, NL;
Sander Frederik Wuister, Eindhoven, NL;
Ivar Schram, Weert, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An imprint lithography apparatus is disclosed that includes a support structure configured to hold an imprint template. The apparatus further includes an actuator located between the support structure and a side of the imprint template, when the imprint template is held by the support structure, configured to apply a force to the imprint template and a force sensor between the support structure and a side of the imprint template, when the imprint template is held by the support structure.