The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
Feb. 27, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Tomoharu Matsushita, Chiba, JP;
Jallepally Ravi, San Ramon, CA (US);
Cheng-Hsiung Tsai, Cupertino, CA (US);
Aravind Kamath, Santa Clara, CA (US);
Xiaoxiong Yuan, San Jose, CA (US);
Manjunatha Koppa, Bangalore, IN;
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/26 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05B 3/26 (2013.01); H01L 21/67103 (2013.01); H05B 2203/037 (2013.01);
Abstract
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a body having a support surface; and a first heater disposed within the body and having a first heating coil and multiple heating zones, wherein a pitch of windings of the first heating coil vary among each of the multiple heating zones to define a predetermined heating ratio between the multiple heating zones.