The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2018
Filed:
May. 08, 2015
Shinko Electric Industries Co., Ltd., Nagano-shi, JP;
Yoshifumi Katayama, Nagano, JP;
Jiro Kawai, Nagano, JP;
SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano-shi, JP;
Abstract
An electrostatic chuck includes a base plate including a penetration hole, a placing table arranged on the base plate, and including an electrode at a position corresponding to the penetration hole, a first cylindrical insulating component arranged on an upper side inside the penetration hole of the base plate, a second cylindrical insulating component arranged on the first cylindrical insulating component, a third cylindrical insulating component arranged under the first cylindrical insulating component, and having an inner diameter smaller than an inner diameter of the first cylindrical insulating component, a connector arranged in the penetration hole, a cylindrical member included in the connector, and including an elastic body in an inner part, and a power feeding terminal included in the connector, and connected to the elastic body. The power feeding terminal touches the electrode of the placing table.