The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2018

Filed:

Jun. 08, 2016
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Ivan Penjovic, Munich, DE;

Josef Martin Paul Hennig, Riemerling, DE;

Oliver Nagler, Munich, DE;

Assignee:

INFINEON TECHNOLOGIES AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/06 (2006.01); G01R 31/28 (2006.01); G01R 1/067 (2006.01); G01L 5/00 (2006.01); H05K 1/02 (2006.01); G01R 31/26 (2014.01);
U.S. Cl.
CPC ...
G01R 31/2891 (2013.01); G01L 5/0028 (2013.01); G01R 1/067 (2013.01); G01L 5/0038 (2013.01); G01R 1/06 (2013.01); G01R 1/06711 (2013.01); G01R 1/06716 (2013.01); G01R 1/06794 (2013.01); G01R 31/26 (2013.01); G01R 31/2642 (2013.01); G01R 31/2887 (2013.01); G01R 31/2889 (2013.01); H05K 1/0268 (2013.01);
Abstract

A method in accordance with various embodiments may include: measuring a contact force between at least one probe and at least one contact pad for a plurality of probe overdrive positions, and determining a relationship between contact force and probe overdrive position from the measured contact forces; determining a first region in the relationship exhibiting a non-linear dependence of the contact force from the probe overdrive position, and a second region exhibiting a linear dependence of the contact force from the probe overdrive position; and determining a process window for a pad probing process based on the determined first region and second region.


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