The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Apr. 13, 2017
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Masato Moriya, Oyama, JP;

Takeshi Ohta, Oyama, JP;

Keisuke Ishida, Oyama, JP;

Takashi Kusama, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/13 (2006.01); H01S 3/081 (2006.01); H01S 3/082 (2006.01); H01S 3/08 (2006.01); H01S 3/137 (2006.01); G01J 3/28 (2006.01); H01S 3/134 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/13 (2013.01); H01S 3/08004 (2013.01); H01S 3/0811 (2013.01); H01S 3/0823 (2013.01); H01S 3/137 (2013.01); G01J 3/28 (2013.01); H01S 3/08009 (2013.01); H01S 3/08036 (2013.01); H01S 3/134 (2013.01); H01S 3/1305 (2013.01); H01S 3/2251 (2013.01); H01S 3/2256 (2013.01);
Abstract

A narrow band laser apparatus may include: a laser resonator; a pair of discharge electrodes; a power supply; a first wavelength measurement device configured to output a first measurement result; a second wavelength measurement device configured to output a second measurement result; and a control unit. The control unit calibrates the first measurement result, based on a difference between the second measurement result derived when the control unit controls the power supply to apply a pulsed voltage to the pair of discharge electrodes with a first repetition frequency and the second measurement result derived when the control unit controls the power supply to apply the pulsed voltage to the pair of discharge electrodes with a second repetition frequency, the second repetition frequency being higher than the first repetition frequency.


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