The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Nov. 05, 2015
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Rabindra N. Das, Lexington, MA (US);

Mark A. Gouker, Belmont, MA (US);

Pascale Gouker, Lexington, MA (US);

Leonard M. Johnson, Carlisle, MA (US);

Ryan C. Johnson, Woburn, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2006.01); H01L 23/373 (2006.01); H01L 23/532 (2006.01); H01L 25/00 (2006.01); H01L 23/48 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 23/535 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 25/0657 (2013.01); H01L 23/3736 (2013.01); H01L 23/481 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 23/535 (2013.01); H01L 23/53209 (2013.01); H01L 23/53238 (2013.01); H01L 25/50 (2013.01); H01L 27/0688 (2013.01); H01L 2224/16145 (2013.01); H01L 2225/06517 (2013.01); H01L 2225/06524 (2013.01); H01L 2225/06527 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06548 (2013.01); H01L 2225/06572 (2013.01);
Abstract

A multi-layer semiconductor device includes two or more semiconductor sections, each of the semiconductor sections including at least at least one device layer having first and second opposing surfaces and a plurality of electrical connections extending between the first and second surfaces. The electrical connections correspond to first conductive structures. The multi-layer semiconductor device also includes one or more second conductive structures which are provided as through oxide via (TOV) or through insulator via (TIV) structures. The multi-layer semiconductor device additionally includes one or more silicon layers. At least a first one of the silicon layers includes at least one third conductive structure which is provided as a through silicon via (TSV) structure. The multi-layer semiconductor device further includes one or more via joining layers including at least one fourth conductive structure. A corresponding method for fabricating a multi-layer semiconductor device is also provided.


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